郭颖教授



    

从事低温等离子体物理基础及应用研究,主要包括等离子体源技术及其诊断和数值模拟、均匀稳定的低温等离子体源设备、等离子体在物质界面中的作用等,参与工业用等离子体去胶、刻蚀、沉积设备的开发设计、模拟计算、改进及检测诊断等。在Plasma Sources Science and TechnologyApplied Physics LettersACS Applied Materials & Interfaces 等发表论文三十多篇。主持国家自然科学青年基金及面上基金3项,主持与美国March等公司合作设备开发项目等。



研究方向:

1、  等离子体源技术、诊断及理论和数值模拟;

2、  等离子体与材料相互作用(超疏水抗菌纤维制备、碳纤维表面处理);

3、  面向半导体加工设备的等离子体技术(等离子体氮化/氧化设备,高选择比自由基刻蚀设备,等离子体增强型炉管ALD设备);

4、  宽禁带半导体材料的在线缺陷检测技术研究。

近年来承担的主要科研项目:

1.   国家自然科学基金面上项目,12175036,大气压耦合放电射流及其制备自修复抗菌纤维表面研究,2022/01-2025/12,主持

2.   上海车仪田科技有限公司,高效等离子体臭氧发生器开发,2023/12-2025/01,主持

3.   上海稷以科技有限公司,炉管设备物理场及等离子体放电场的模拟及诊断,2023/11-2025/11,主持

4.   上海稷以科技有限公司,高密度等离子体源开发,202105-202305,已结题,主持

5.   国家自然科学基金面上项目,11475043,常压脉冲协同射频辉光等离子体放电过程及其薄膜聚合沉积研究,2014/01-2018/12已结题,主持

6.   国家自然科学基金青年基金项目,11005017,高密度低温二次电子辅助脉冲射频等离子体及柔性电子基板表面改性,2011/01-2013/12,已结题,主持

7.   与诺信-March公司合作,低气压低温等离子体研究以及相关技术领域的应用开发,2013/07-2017/06,已结题,主持

近年来发表的代表性论著、专利:

论文

1.         Zhiduan Liu,Lili Gu,Junlin Fang,Shaofeng Xu,Ying Guo*,Jianjun ShiPenetration of ionization wave through dielectric microhole in atmospheric pulsed discharges,Applied Physics Letters,2025,126,044101

2.         Ying Tian,Yongyin Kang,Zhao Xu,Shaofeng Xu,Dan Yu,Wei Wang,Jianjun Shi,and Ying Guo* ,Dynamic fluorescence via manipulation of surface wrinkling in polyester fabrics,Applied Surface Science, 2025,685,162036

3.         Guo Ying,Guo Xuanying,Xu Shaofeng,Shi Jianjun,Estimation of total forces of jets on liquid interfaces using image processing methods,JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2024,57,245206

4.         Ying Tian,Shaofeng Xu,Wei Wang, Dan Yu,Jianjun Shi and Ying Guo,Modelling and preparation of composite wrinkled structures on polyester fabric via plasma treatment,JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2024,57,235301

5.         Tian Ying, Xu Shaofeng,Zhang Hao,Wang Wei,Yu Dan, Shi Jianjun,and Guo Ying, Superhydrophobic wrinkled structures constructed on polyester fabrics treated by plasma, PLASMA PROCESSES AND POLYMERS,2024,21,e2300137

6.         Yarong Zhang, Ying Guo*; Asymmetrical ignition of radio frequency discharge in atmospheric pressure cascade glow discharges, Plasma Sources Science and Technology, 2023, 32

7.         Chenzi Lu; Ying Guo*; Manipulating the propagation of ionization wave by pulsed electrical potential in atmospheric plasma jet, Applied Physics Letters, 2023, 123(11): 114104-1-5

8.         Lili Gu; Yarong Zhang; Ying Guo*; Dynamics of dielectric micropore discharge in atmospheric pulsed dielectric barrier discharge, Physics of Plasmas , 2023, 30(10)

9.         Peiru Zhang; Lili Yang; Ying Guo*,Underwater Highly Pressure-Sensitive Fabric Based on Electric-Induced Alignment of Graphene, Materials,2023,16(4)1567.

10.     Liyun Xu; Zhao Xu; Jianjun Shi; Ying Guo*; Earthworm-Inspired Ultradurable Superhydrophobic Fabrics from Adaptive Wrinkled Skin, ACS Appl. Mater. Interfaces, 2021, 13: 6758-6766

11.     Qianhan HAN, Chenyu WU, Ying GUO* and Jianjun SHITemporal evolution of atmospheric cascade glow discharge with pulsed discharge and radio frequency dischargePlasma Sci. Technol. 22 (2020) 034014;

12.     Ying Guo, Zhengming Shi, Qianhan Han, Chenyu Wu, Jing Zhang, and Jianjun Shi, Dependence of discharge ignition on initial condition in atmospheric cascade glow dischargesAIP Advances, 10, 035006 (2020);

13.     Liyun Xu,Ying Guo*, Liu Liu, Guanghui Baid, Jianjun Shi, Lu Zhang, Xijiang Chang,Ruiyun Zhang Jing Zhang, Jianyong YuFabrication of fluorine-free, comfortable and wearable superhydrophobic fabrics via capacitance coupled plasma with methyl side-chain lauryl methacrylate coatingsProgress in Organic Coatings 146 (2020) 105727

14.     Chengxian PAN, Zhengming SHI , Qianhan HAN,Ying GUO* and Jianjun SHI Numerical simulation of atmospheric pulsemodulated radio-frequency glow discharge ignition characteristics assisted by a pulsed discharge, Plasma Sci. Technol. 22015405, (2020)

15.     Guo, Y., Q. H. Han, X. D. Wang, and J. J. Shi. Injection of Plasma Plume into Radio Frequency Atmospheric Pressure Glow Discharge.. PHYSICS OF PLASMAS, 2017, 24, (7)

16.     Zhang, J., Y. Guo, X. J. Huang, J. Zhang, and J. J. Shi. Operation Mode on Pulse Modulation in Atmospheric Radio Frequency Glow Discharges.. Plasma Science & Technology , 2016, 18,(10), 974-977.

17.     Xiaojiang Huang, Ying Guo*; Jing Zhang; Yoshitaka Nakano; Hideo Sugai; Keiji Nakamura, In situ monitoring of GaN substrate surface in ICP containing energetic electrons, Applied Surface Science, 2014,  292,387– 389

18.     Yanfeng Xie, Ying Guo*, The Effects of Contents of Oxygen in Argon-oxygen Mixed Gas on Polyethylene Terephthalate (PET) Films by CCP Discharge2012 International Conference on Engineering MaterialsAdvanced Materials Research, 2013,651, 257-262.

19.     Ying Guo, Jing Zhang et alGrowth of Single-Crystalline Nanorods in Atmospheric Plasma, Jpn. J. Appl. Phys. 2011, 50 , 01AH04

20.     Ying Guo, Keiji Nakamura, Jing Zhang, Yoshitaka Nakano, and Hideo SugaiObservation of Optical Fluorescence of GaN Thin Films in an Inductively-CoupledPlasma Containing High Energy ElectronsJpn. J. Appl. Phys. 2011, 5001AA02

21.     Ying Guo Jing Zhang Jinzhou Xu Jianyong YuVariable Morphology of PTFE-Like Polymer Nanocrystals Fabricated by Oriented Plasma Polymerization at Atmospheric Pressure, Applied Surface Science254/11 ,2008, 3408-3411

22.     Ying Guo, Jing Zhang, Feng Zhu, ZhongXue Yang, Jinzhou Xu, Jianyong YuSelf-Assembly of β-Ga2O3 nanobeltsApplied Surface Science, 254 ,2008, 5124–5128

23.     Jinzhou Xu, Ying Guo, Lei Xia, Jing ZhangDischarge transitions between glow-like and filamentaru in a xenon/chlorine-filled barrier discharge lamp, PLASMA SOURCES SCIENCE&TECHNOLOGY, 16 (2007),488-453

24.     HE Tao, GUO Ying, ZHANG Jing,Characterization of Crystalline Nanoparticles/Nanorods Synthesized by Atmospheric Plasma Enhanced Chemical Vapor Deposition of PerfluorohexanePlasma Science and Technology,  10/6, 2008, 706-709

25.     J. Zhang, Y. Guo, J. Z. Xu, X. S. Fang, and H. K. Xie,D. L. Shi, P. He, and W. J. van Ooij , Single-crystalline polytetraflfluoroethylene-like nanotubes prepared from atmospheric plasma discharge, APPLIED PHYSICS LETTERS 86, 131501 ,2005

主要学术兼职:

1.   中国电工技术学会等离子体及应用专委会委员(第一届2016-2020,第二届2021-2025

2.   中国力学学会等离子体科学与技术专委会秘书 (第七2015-2019、八届2020-2024

国际交流与合作:

2009.4-2010.4 日本中部大学电气工程系  访问学者

联系电话:021-67792090-557             E-MAILguoying@dhu.edu.cn